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Zeiss Merlin

Scanning electron microscope Zeiss Merlin

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Zeiss Merlin is a Scanning Electron Microscope with Field Emission cathode, GEMINI II electron-optics column, oil-free vacuum system.


Except the standard In-lens SE and SE2 the microscope is equipped with STEM detector, four-quadrant backscattered detector (AsB) and low-loss back-scattered electrons detector (ESB).
Analytical capabilities are extended with Oxford Instruments Inca X-Act EDX spectrometer and Oxford Instruments Channel5 EBSD.

 

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Oxford Instruments INCAx-act

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Energy Despersive X-Rays Spectrometer (EDS) Oxford Instruments INCAx-act equipped with wide-area high sensitive detector which allows to make truly express-analysis of samples even at low beam currents of about 200 - 300 pA. So it keeps high SE-image resolution and produces minimal damage to sensitive samples.

Installed spectrometer is fully integrated with Oxford Instruments CHANNEL5 EBSP processing and acquisition software using the INCASynergy module. Such combination gives additional analytical power to crystalline objects investigations.

Detailed introduction to X-Rays Microanalysis  coold be found in J. Goldstein book "Scanning Electron Microscopy and X-ray Microanalysis", probably the best book on that topic.


Scanning Electron Microscopy and X-ray Microanalysis
Scanning Electron Microscopy and X-ray Microanalysis

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