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Oxford Instruments INCAx-act

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Energy Despersive X-Rays Spectrometer (EDS) Oxford Instruments INCAx-act equipped with wide-area high sensitive detector which allows to make truly express-analysis of samples even at low beam currents of about 200 - 300 pA. So it keeps high SE-image resolution and produces minimal damage to sensitive samples.

Installed spectrometer is fully integrated with Oxford Instruments CHANNEL5 EBSP processing and acquisition software using the INCASynergy module. Such combination gives additional analytical power to crystalline objects investigations.

Detailed introduction to X-Rays Microanalysis  coold be found in J. Goldstein book "Scanning Electron Microscopy and X-ray Microanalysis", probably the best book on that topic.


Scanning Electron Microscopy and X-ray Microanalysis
Scanning Electron Microscopy and X-ray Microanalysis

System specifications:

  • Spectrometer type: Energy despersive spectrometer (EDS);
  • Detector: Analytical Silicon Drift Detector (SDD) : INCAx-act;
    • LN2-free, Peltier cooled;
  • Spectral resolution: 126 eV (Mn), Guaranteed carbon resolution in accordance with ISO 15632:2002;
  • Sensitivity: 0,1%;
  • Integrated with EBSD;