Interdisciplinary Resource Center for Nanotechnology

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NanoMaker lithography system

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NanoMaker is a software/hardware system from Interface Ltd. for SEM/FIB based lithography.
System allows performing  ion beam lithography, ion beam milling and image aquisition and compensates static distortion and dynamic delays of deflecting system.

Additional software for FIB milling simulation considering sputtering rate angle dependence allows performing data correction for 3D-shapes manufacturing.