Interdisciplinary Resource Center for Nanotechnology

...going for nano

Zeiss ORION

Scanning Helium Ion Microscope is a novel device that incorporate both Focused Ion Beam and Scanning Electron Mycroscopy approaches. Being a very surface tool due to the origin of ion beam with solid interaction it is also the first scanning microscope with a subnanometer resolution (theoretical resolution limit is 0.25 nm) .

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1 Scanning ion helium microscope Zeiss ORION
2 NanoMaker lithography system