Interdisciplinary Resource Center for Nanotechnology

...going for nano


Scanning Helium Ion Microscope is a novel device that incorporate both Focused Ion Beam and Scanning Electron Mycroscopy approaches. Being a very surface tool due to the origin of ion beam with solid interaction it is also the first scanning microscope with a subnanometer resolution (theoretical resolution limit is 0.25 nm) .

Title Filter     Display # 
# Article Title
1 Scanning ion helium microscope Zeiss ORION
2 NanoMaker lithography system