Interdisciplinary Resource Center for Nanotechnology

...going for nano

Sample Preparation

Sample preparation complex installed at IRC lab includes systems for precise ion etching and spattering (Gatan PECS, Gatan PIPS, Fischione NanoMill) as well as machines to care out the whole cycle of TEM sample preparation.

Gatan PECS


Gatan Precision Etching & Coating System

Convinient SEM end EDX sample preparation system

Ar-ion beam surface etching.

Target Ar-ion sputtering and coating.

Ion energy up to 10 keV.

Precise film thickness monitor.


Gatan PIPS


Gatan Precision Ion Polishing System

TEM sample finishing never was so easy.

Final Ar-ion polishing of TEM sample with dual beam setup and real-time video control.

Ion energy up to 5 keV.

Automatc thickness endpoint optical transmission sensor.

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